Wutar Microwave
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Samar da Wutar lantarki ta Microwave
Samuwar wutar lantarki ta Microwave sabon nau'in samar da wutar lantarki ne bisa fasahar inverter mai girma na IGBT. Yana haɗaka samar da wutar lantarki mai ƙarfi na anode, wutar lantarki na filament da samar da wutar lantarki (sai dai 3kW wutar lantarki ta microwave). Magnetron kalaman yana ba da yanayin aiki. Ana amfani da wannan samfurin a MPCVD, etching plasma etching microwave, degumming plasma degumming da sauran filayen.